ZENIX
AGV

AGV is the unmanned electric vehicle automatically transferring and loading the freight in various ways.
The feature of ZENIX AGV is the self-development of main systems. ZENIX has developed and is applying the AGV control
system and the software of volume management system, and has developed and is applying the driving and steering motor
control board optimized for AGV. We continually proceed with localization/self-development of main components and
software, not depending on the foreign goods.

CLEAN AGV
· Used for automatic loading/unloading of the transferred objects on the production
  line of semiconductor, LCD, OLED and pharmaceutical vial
· Transferred objects : 200mm CST, 300mm Foup, CF/TFT MASK & Case, CF/TFT
                              Glass Crate, Glass, Vial
LCD/OLED Bare Mask AGV
Loading/Unloading articulated robot
Degree of alignment precision 1mm
Load weight 200kg ( User Order )
Speed 1m/s ( User Order )
Transported material LCD/OLED MASK Cassette
Main use LCD/OLED production line ( Class 1 )
LCD/OLED Cassette AGV
Loading/Unloading Clean Conveyor
Degree of alignment precision ±10mm
Load weight 100kg ( User Order )
Speed 1m/s ( User Order )
Transported material LCD/OLED Glass Cassette
Main use LCD/OLED production line ( Class 100 )
LCD/OLED CF Mask AGV
Loading/Unloading multi-stage sliding robot
Degree of alignment precision 1mm
Load weight 180kg ( User Order )
Speed 0.8m/s ( User Order )
Transported material LCD CF Mask case and automatic transported material in the clean room
Main use LCD/OLED Mask Line
LCD/OLED Crate AGV
Loading/Unloading Clean Conveyor
Degree of alignment precision ±10mm
Load weight 3,000kg ( User Order )
Speed 1.3m/s ( User Order )
Transported material Crate glass and pallet in the clean room
Main use LCD/OLED glass manufacturing factory
LCD/OLED production line
LCD/OLED TFT Mask AGV
Loading/Unloading Vision Align Stage
Degree of alignment precision 1mm
Load weight 60kg ( User Order )
Speed 0.8m/s ( User Order )
Transported material LCD TFT mask case and automatic transported material in the clean room
Main use LCD/OLED Mask Line
Semiconductor 200mm AGV
Loading/Unloading 6-axis robot
Degree of alignment precision ±1mm
Load weight 10kg ( User Order )
Speed 1m/s ( User Order )
Transported material 200mm Cassette, 300mm Foup
Main use 200mm, 300mm semiconductor wafer
production line ( Class 100 )
Pharmaceutical vial AGV
Loading/Unloading Multi-stage sliding robot
Degree of alignment precision 1mm
Load weight 60kg ( User Order )
Speed 1.3m/s ( User Order )
Transported material Pharmaceutical vial transportation
Main use Vial manufacturing factory