ZENIX
LCD/OLED Logistics

We supplyLCD/OLED production line glass cassette, and rack master, OHS/OHCV, stocker and AGV
which are the automation equipment for mask logistics.
We have developed on our own and are using the
software flexibly controlling the volume management of the whole system, and are accumulating the reliability
of the products through simulation of the transferred objects volume, simulation of air flow in the stocker,
and dynamicx stress analysis of the rack master robot.

Stocker
It is the system for inventory management, volume controlling,
and carrying- in/carrying-out/storage of the glass cassette, mask case and mask.
LCD/OLED Mask Stocker [Type A]
Loading/Unloading 7-axis robot & rack master
Degree of alignment precision 1mm
Load weight 200kg
Speed 1.5m/s ( User Order )
Transported material LCD/OLED Mask Cassette
Clean Class Class100
Main use LCD/OLED production line
LCD/OLED Mask Stocker [Type B]
Loading/Unloading 7-axis robot & rack master
Degree of alignment precision 1mm
Load weight 200kg
Speed 1.5m/s ( User Order )
Transported material LCD/OLED Mask
Clean Class Class1
Main use LCD/OLED production line
Stocker Robot
Loading/Unloading 7-axis robot
Degree of alignment precision 1mm
Load weight 200kg
Speed 1.5m/s ( User Order )
Transported material LCD/OLED Mask & Mask Cassette
Clean Class Class1
Main use LCD/OLED production line
LCD/OLED Conveyor
Loading/Unloading Clean Conveyor
Degree of alignment precision 1mm
Load weight 1,500kg ( User Order )
Speed 0.5m/s ( User Order )
Transported material LCD/OLED Cassette, Mask
Main use LCD/OLED production line