ZENIX
Semiconductor
Logistics

We aresupplying stocker, OHS/OHT, rail system and AGV which are the automation equipment for 200mm
Cassette and 300mm Foup.
We have developed on our own and are using the software flexibly controlling
the volume management of the whole system, and are accumulating the reliability of the products through simulation
of the transferred objects volume, simulation of air flow in the stocker.

Stocker
It is the system for inventory management, volume controlling,
and carrying- in/carrying-out/storage of Foup in the Semiconductor FAB processing.
Foup Stocker for semiconductor
Transported material 300mm Wafer Foup
Degree of alignment precision 1mm
Load weight 10kg
Crane Driving Speed 1.5m/s ( User Order )
Lift Speed 1m/s ( User Order )
Main use 300mm Semiconductor production line
( Class 100 )