ZENIX
Semiconductor
Logistics

We aresupplying stocker, OHS/OHT, rail system and AGV which are the automation equipment for 200mm
Cassette and 300mm Foup. We have developed on our own and are using the software flexibly controlling
the volume management of the whole system, and are accumulating the reliability of the products through simulation
of the transferred objects volume, simulation of air flow in the stocker.
Rail system
It is the movement path system for overhead transportation of OHT/OHS.
Rail system
Target for use Rail driving vehicle ( OHT/OHS )
Composition AL Rail, Contactless Power Cable
Type Straight, Curve, Branch, Double Branch
Main use 300mm semiconductor production line ( Class 100 )
Production line requiring overhead transportation